Polycrystalline silicon carbide manufactured using chemical vapor deposition, for industrial use

'carbid':3 'chemic':6 'deposit':8 'industri':10 'manufactur':4 'polycrystallin':1 'silicon':2 'use':5,11 'vapor':7

Polycrystalline silicon carbide semi-conductor wafers, rings, trays and wafer boats manufactured using chemical vapor deposition

'boat':12 'carbid':3 'chemic':15 'conductor':6 'deposit':17 'manufactur':13 'polycrystallin':1 'ring':8 'semi':5 'semi-conductor':4 'silicon':2 'tray':9 'use':14 'vapor':16 'wafer':7,11

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