Metrology apparatus for semiconductor manufacturing, namely, in-situ units for measuring thin film stress on semiconductor wafers during transport into and out of process chambers of physical vapor deposition and chemical vapor deposition tools; downloadable and recorded computer software for controlling, operating, and analyzing measurements from in-situ units for measuring thin film stress on semiconductor wafers during transport into and out of process chambers of physical vapor deposition and chemical vapor deposition tools

'analyz':45 'apparatus':2 'chamber':26,67 'chemic':32,73 'comput':39 'control':42 'deposit':30,34,71,75 'download':36 'film':14,55 'in-situ':7,48 'manufactur':5 'measur':12,46,53 'metrolog':1 'name':6 'oper':43 'physic':28,69 'process':25,66 'record':38 'semiconductor':4,17,58 'situ':9,50 'softwar':40 'stress':15,56 'thin':13,54 'tool':35,76 'transport':20,61 'unit':10,51 'vapor':29,33,70,74 'wafer':18,59

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