Mass spectrometer-based leak detectors for use in detecting gases used in connection with semiconductor manufacturing, air conditioning, refrigeration systems, the automotive industry, underground utilities, the chemical and petrochemical industries, the aerospace industry, the pharmaceutical industry, power plants and other industries; and compact vacuum measurement instruments, namely, vacuum-based mass spectrometers

'aerospac':33 'air':18 'automot':23 'base':4,51 'chemic':28 'compact':44 'condit':19 'connect':14 'detect':10 'detector':6 'gase':11 'industri':24,31,34,37,42 'instrument':47 'leak':5 'manufactur':17 'mass':1,52 'measur':46 'name':48 'petrochem':30 'pharmaceut':36 'plant':39 'power':38 'refriger':20 'semiconductor':16 'spectromet':3,53 'spectrometer-bas':2 'system':21 'underground':25 'use':8,12 'util':26 'vacuum':45,50 'vacuum-bas':49

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