Scientific apparatus and instruments, namely, precision micropositioning apparatus; controllers for precision micropositioning apparatus

'apparatus':2,8,13 'control':9 'instrument':4 'microposit':7,12 'name':5 'precis':6,11 'scientif':1

Electromotive drives for single-axis and multi-axis positioning systems, piezoelectric drives for single-axis and multi-axis positioning systems; piezoelectric motors for precision micropositioning apparatus; piezoelectric linear motors

'apparatus':30 'axi':6,10,18,22 'drive':2,14 'electromot':1 'linear':32 'microposit':29 'motor':26,33 'multi':9,21 'multi-axi':8,20 'piezoelectr':13,25,31 'posit':11,23 'precis':28 'singl':5,17 'single-axi':4,16 'system':12,24

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