Apparatus and instruments in the field of plasma technology and semiconductor processing; apparatus and instruments for handling and plasma treatment of semiconductor wafers, plastics or other materials; robotic wafer handlers; plasma cluster tools; plasma research apparatus and instruments; computer hardware and software for use therewith; and parts and fittings for the aforesaid goods

'aforesaid':52 'apparatus':1,13,36 'cluster':32 'comput':39 'field':6 'fit':49 'good':53 'handl':17 'handler':30 'hardwar':40 'instrument':3,15,38 'materi':27 'part':47 'plasma':8,19,31,34 'plastic':24 'process':12 'research':35 'robot':28 'semiconductor':11,22 'softwar':42 'technolog':9 'therewith':45 'tool':33 'treatment':20 'use':44 'wafer':23,29

PLASMALAB

Owner

Goods & Services