Laboratory apparatus and instruments for the exchange of substances and heat with regard to plasma technology and semiconductor processing; laboratory robots for handling semiconductor wafers; tool measuring instruments, namely, plasma cluster tools and plasma processing research apparatus; computer hardware and software for operating the foregoing

'apparatus':2,37 'cluster':31 'comput':38 'exchang':7 'forego':45 'handl':23 'hardwar':39 'heat':11 'instrument':4,28 'laboratori':1,20 'measur':27 'name':29 'oper':43 'plasma':15,30,34 'process':19,35 'regard':13 'research':36 'robot':21 'semiconductor':18,24 'softwar':41 'substanc':9 'technolog':16 'tool':26,32 'wafer':25

PLASMAPRO

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