X-Ray monitoring, measurement and inspection equipment for characterizing dimensional and/or material properties of samples, namely, for measuring and inspecting patterned structures and films in the field of semiconductor manufacturing, and systems comprised of hardware and recorded software for process control of semiconductors manufacturing

'and/or':12 'character':10 'compris':34 'control':42 'dimension':11 'equip':8 'field':28 'film':25 'hardwar':36 'inspect':7,21 'manufactur':31,45 'materi':13 'measur':5,19 'monitor':4 'name':17 'pattern':22 'process':41 'properti':14 'ray':3 'record':38 'sampl':16 'semiconductor':30,44 'softwar':39 'structur':23 'system':33 'x':2 'x-ray':1

POLARION

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