Semiconductors, integrated circuits, circuit boards, semiconductor devices, micro-electromechanical system (MEMS) sensors and actuators for consumer, commercial and industrial applications, namely, air velocity sensors, liquid flow sensors, gas flow sensors, pressure sensors, vacuum sensors, humidity sensors, and gas detection sensors

'actuat':15 'air':23 'applic':21 'board':5 'circuit':3,4 'commerci':18 'consum':17 'detect':40 'devic':7 'electromechan':10 'flow':27,30 'gas':29,39 'humid':36 'industri':20 'integr':2 'liquid':26 'mem':12 'micro':9 'micro-electromechan':8 'name':22 'pressur':32 'semiconductor':1,6 'sensor':13,25,28,31,33,35,37,41 'system':11 'vacuum':34 'veloc':24

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