Software-controlled systems used in the semiconductor manufacturing industry, namely, recorded software for automating and controlling machines that manufacture semiconductors and computer memory hardware containing the foregoing recorded software

'autom':15 'comput':23 'contain':26 'control':3,17 'forego':28 'hardwar':25 'industri':10 'machin':18 'manufactur':9,20 'memori':24 'name':11 'record':12,29 'semiconductor':8,21 'softwar':2,13,30 'software-control':1 'system':4 'use':5

'equip':4 'process':3 'semiconductor':1 'wafer':2

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