Treatment of materials, namely, surface treatment of workpieces under vacuum by plasma containing nitrogen to cause nitrogen diffusion into and hardening of the material being treated

'caus':16 'contain':13 'diffus':18 'harden':21 'materi':3,24 'name':4 'nitrogen':14,17 'plasma':12 'surfac':5 'treat':26 'treatment':1,6 'vacuum':10 'workpiec':8

Industrial surface treatment equipment surface for treatment of workpieces under vacuum by plasma containing nitrogen to cause nitrogen diffusion into and hardening of the material being treated, namely, vacuum plasma treatment systems comprised of a pulsed voltage generator, controls, and treatment chamber and structural parts therefor

'caus':17 'chamber':42 'compris':33 'contain':14 'control':39 'diffus':19 'equip':4 'generat':38 'harden':22 'industri':1 'materi':25 'name':28 'nitrogen':15,18 'part':45 'plasma':13,30 'puls':36 'structur':44 'surfac':2,5 'system':32 'therefor':46 'treat':27 'treatment':3,7,31,41 'vacuum':11,29 'voltag':37 'workpiec':9

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