PRESSURETEMP

Owner

Goods & Services

Apparatus and instruments for physics, namely, in-situ semiconductor process pressure and temperature measurement wafers equipped with embedded electronic sensors for monitoring pressure and thermal profiles inside semiconductor processing chambers; Diagnostic equipment for research laboratory use, namely, pressure and temperature sensing wafers for measuring temperature, pressure, thermal behavior, and chamber environmental conditions during semiconductor wafer processing; Measures for measuring pressure and temperature distribution, thermal profiles, and environmental characteristics within semiconductor process chambers; Computer software, recorded, for collecting, analyzing, and displaying pressure and temperature measurement data obtained during semiconductor processing; Computer software applications, downloadable, for collecting, analyzing, and displaying pressure and temperature measurement data obtained during semiconductor processing