Optical monitoring, measurement and inspection equipment for measuring physical dimensions of samples, thicknesses of films and for analyzing chemical composition of materials, and systems comprised of hardware and software for process control, and computer operating programs for use therewith

'analyz':18 'chemic':19 'composit':20 'compris':25 'comput':34 'control':32 'dimens':10 'equip':6 'film':15 'hardwar':27 'inspect':5 'materi':22 'measur':3,8 'monitor':2 'oper':35 'optic':1 'physic':9 'process':31 'program':36 'sampl':12 'softwar':29 'system':24 'therewith':39 'thick':13 'use':38

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