Computer software program for monitoring, collecting and analyzing data regarding operating conditions for thin film deposition equipment which can monitor control limits, identify poor equipment conditions, compare equipment conditions and produce customer reports with recommendations based on operating specification

'analyz':8 'base':36 'collect':6 'compar':27 'comput':1 'condit':12,26,29 'control':21 'custom':32 'data':9 'deposit':16 'equip':17,25,28 'film':15 'identifi':23 'limit':22 'monitor':5,20 'oper':11,38 'poor':24 'produc':31 'program':3 'recommend':35 'regard':10 'report':33 'softwar':2 'specif':39 'thin':14

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