Computer-Based System for Evaluating the Performance of Semiconductor Wafer Processing Equipment Comprised of Resistivity Test and Mapping Systems and Lithography Characterization Systems Comprised of Some or All of the Following: Programmable Computer, Instrumentation Interface, Graphics Terminal, Graphics Printer, Resistivity Test Unit, and Programmable x-y Prober with Optics and Probe Card

'base':3 'card':54 'character':23 'compris':14,25 'comput':2,34 'computer-bas':1 'equip':13 'evalu':6 'follow':32 'graphic':37,39 'instrument':35 'interfac':36 'lithographi':22 'map':19 'optic':51 'perform':8 'printer':40 'probe':53 'prober':49 'process':12 'programm':33,45 'resist':16,41 'semiconductor':10 'system':4,20,24 'termin':38 'test':17,42 'unit':43 'wafer':11 'x':47 'x-i':46 'y':48

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