Refrigerating apparatus used for industrial purposes; refrigerating installations used for industrial purposes; air purifying units for industrial purposes; air conditioning installations for industrial use; air conditioners used for industrial purposes; air cooling apparatus used for industrial purposes; freezers for industrial purposes; cooling and freezing apparatuses, namely, chillers used with etching devices for the process of manufacturing semiconductors

'air':13,19,25,31 'apparatus':2,33,45 'chiller':47 'condit':20 'condition':26 'cool':32,42 'devic':51 'etch':50 'freez':44 'freezer':38 'industri':5,11,17,23,29,36,40 'instal':8,21 'manufactur':56 'name':46 'process':54 'purifi':14 'purpos':6,12,18,30,37,41 'refriger':1,7 'semiconductor':57 'unit':15 'use':3,9,24,27,34,48

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