U.S. federal trademark · Serial No. 97519870 · Reg. No. 7311626
Semiconductor manufacturing machines; Semiconductor substrates manufacturing machines; Semiconductor wafer processing equipment; Semiconductor wafer processing machines; replacement parts and fittings for all of the aforementioned goods; Components of equipment for the manufacture, processing, and fabrication of semiconductors, namely, chucks, pedestals, o-rings, edge rings, mechanisms for sealing, actuators, pumps, vacuums, pipes, feed lines, fans for delivery and exhaust of liquid and gas, chamber showerheads, doors, windows, and chamber walls; Replacement parts for equipment for the manufacture, processing, and fabrication of semiconductors, namely, chucks, pedestals, o-rings, edge rings, mechanisms for sealing, actuators, pumps, vacuums, pipes, feed lines, fans for delivery and exhaust of liquid and gas, chamber showerheads, doors, windows, and chamber walls
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