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Machines for contamination control in semiconductor device manufacturing with integrated recorded software for analyzing data, sold as a unit; Machines for contamination control in semiconductor device manufacturing with integrated recorded software for controlling the machines, sold as a unit; Machines for cleaning of wafer carriers and reticle carriers in semiconductor device manufacturing with integrated recorded software for optimizing cleaning of wafer carriers and reticle carriers, sold as a unit; Machines for contamination control in semiconductor device manufacturing with integrated recorded software for optimizing contamination control, sold as a unit; Machines for semiconductor device manufacturing with integrated recorded operating system software, sold as a unit; Machines for cleaning of wafer carriers and reticle carriers in semiconductor device manufacturing with integrated recorded software for optical inspection for optimizing cleaning of wafer carriers and reticle carriers, sold as a unit; Machines for contamination control in semiconductor device manufacturing with integrated recorded software for optical inspection for optimizing contamination control, sold as a unit

Downloadable and recorded software for use in semiconductor device manufacturing, namely downloadable and recorded software for optical inspection of semiconductor wafer carriers and front-opening unified pods (FOUPs); Downloadable and recorded software for use in connection with machines for contamination control in semiconductor device manufacturing, namely, downloadable and recorded computer software for optical inspection of semiconductor wafer carriers and front-opening unified pods (FOUPs); Downloadable and recorded software for controlling machines for contamination control and cleaning of wafer carriers and reticle carriers in semiconductor device manufacturing; Downloadable and recorded software for analyzing data related to contamination control and cleaning of wafer carriers and reticle carriers in semiconductor device manufacturing; Downloadable and recorded software for optimizing contamination control in semiconductor device manufacturing; Downloadable and recorded software for optimizing cleaning of wafer carriers and reticle carriers in semiconductor device manufacturing