Machines for polishing, namely, machines for polishing optical surfaces in particular high precision optical surfaces in the fields of optics and microelectric substrates

'field':18 'high':12 'machin':1,5 'microelectr':22 'name':4 'optic':8,14,20 'particular':11 'polish':3,7 'precis':13 'substrat':23 'surfac':9,15

Machines for measuring, namely optical metrology instruments for measuring the curvature and surface form of optical surfaces, in particular high precision optical surfaces in the fields of optics and microelectronic substrates.

'curvatur':11 'field':26 'form':14 'high':20 'instrument':7 'machin':1 'measur':3,9 'metrolog':6 'microelectron':30 'name':4 'optic':5,16,22,28 'particular':19 'precis':21 'substrat':31 'surfac':13,17,23

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