Spectroscopic device for in-situ real time monitoring used for analysis of concentration and etch rate of multiple-component chemistries and using closed-loop feedback and dosing to maintain constant etch rate and concentration

'analysi':12 'chemistri':22 'close':26 'closed-loop':25 'compon':21 'concentr':14,37 'constant':33 'devic':2 'dose':30 'etch':16,34 'feedback':28 'in-situ':4 'loop':27 'maintain':32 'monitor':9 'multipl':20 'multiple-compon':19 'rate':17,35 'real':7 'situ':6 'spectroscop':1 'time':8 'use':10,24

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