U.S. federal trademark · Serial No. 75673159 · Reg. No. 2830260
Semiconductor Wafer Processing Equipment, and Operational Software therefor, namely, - epitaxial reactors; [ chemical vapor deposition reactors; physical vapor deposition reactors; plasma etchers; ] ion implanters [ ; chemical mechanical polishers; and semiconductor wafer process and diagnostic and control equipment ]
Source: USPTO federal trademark records. Informational only, not legal advice. Status and details may lag the live USPTO database.