Laboratory equipment for cleaning high vacuum systems in the nature of an in situ plasma source, namely, a plasma hydrocarbon contamination cleaner in the nature of an inductively coupled plasma source and chamber for downstream plasma cleaning of SEMs (Scanning Electron Microscopes), TEMs (Transmission Electron Microscopes), FIBs (Focused Ion Beams), and e-beam inspection vacuum systems, namely, mask repair tools, review SEMs, critical dimension SEMs, all to remove and mitigate hydrocarbon and carbon deposits on surfaces and in gas phase

'beam':50,54 'carbon':74 'chamber':33 'clean':4,37 'cleaner':22 'contamin':21 'coupl':29 'critic':64 'deposit':75 'dimens':65 'downstream':35 'e':53 'e-beam':52 'electron':41,45 'equip':2 'fib':47 'focus':48 'gas':80 'high':5 'hydrocarbon':20,72 'induct':28 'inspect':55 'ion':49 'laboratori':1 'mask':59 'microscop':42,46 'mitig':71 'name':17,58 'natur':10,25 'phase':81 'plasma':15,19,30,36 'remov':69 'repair':60 'review':62 'scan':40 'sem':39,63,66 'situ':14 'sourc':16,31 'surfac':77 'system':7,57 'tem':43 'tool':61 'transmiss':44 'vacuum':6,56

QWK-SWITCH

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