Industrial production machines for treating and processing microelectronic substrates namely semiconductor wafers, semiconductor substrates, micromachine substrates, flat panel displays and data disks, namely, automated multi-station fluid processing machine systems for the manufacture and processing of microelectronic substrates comprising substrate handling machines, substrate chemical processing machines and related controllers sold as a unit

'autom':24 'chemic':45 'compris':40 'control':50 'data':21 'disk':22 'display':19 'flat':17 'fluid':28 'handl':42 'industri':1 'machin':3,30,43,47 'manufactur':34 'microelectron':8,38 'micromachin':15 'multi':26 'multi-st':25 'name':10,23 'panel':18 'process':7,29,36,46 'product':2 'relat':49 'semiconductor':11,13 'sold':51 'station':27 'substrat':9,14,16,39,41,44 'system':31 'treat':5 'unit':54 'wafer':12

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