[thin film processing machines,] wafer processing machines, etch technology processing machines, [and deposition technology processing machines] for the manufacture and processing of computer hardware, [computer software,] and computer components, namely, semiconductors, integrated circuits[, and flat panel displays]

'circuit':33 'compon':29 'comput':23,25,28 'deposit':13 'display':37 'etch':8 'film':2 'flat':35 'hardwar':24 'integr':32 'machin':4,7,11,16 'manufactur':19 'name':30 'panel':36 'process':3,6,10,15,21 'semiconductor':31 'softwar':26 'technolog':9,14 'thin':1 'wafer':5

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