Semiconductor manufacturing machines and their component parts and fittings; Plasma etching machines; Semiconductor wafer processing equipment; Dry etching machines for manufacturing semiconductors; Conductor etching machines for manufacturing semiconductors; Semiconductor manufacturing machines, namely, processing chambers; Machines for ashing semiconductor wafers

'ash':37 'chamber':34 'compon':6 'conductor':23 'dri':17 'equip':16 'etch':11,18,24 'fit':9 'machin':3,12,19,25,31,35 'manufactur':2,21,27,30 'name':32 'part':7 'plasma':10 'process':15,33 'semiconductor':1,13,22,28,29,38 'wafer':14,39

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