U.S. federal trademark · Serial No. 74052533 · Reg. No. A1408961
process and test equipment and electrical and electronic control apparatus and instruments; namely, apparatus for vacuum process wafer fabrication; vacuum and plasma process and control equipment and instruments, power supplies and controllers for plasma processing; controllers for plasma etching and deposition, low pressure vapor chemical deposition, metal organic chemical vapor deposition, sputtering; micro processor based computer compatible apparatus for the above; and process automation apparatuses for vacuum apparatuses and processes comprising deposition, etching and metal organic vapor deposition
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