Ion generators, excluding those for air purification or water purification, namely, ionization apparatus for use in the manufacture of semiconductors and surface modification of resin substrates, metals, and conductive films in scientific, laboratory, and industrial settings

'air':6 'apparatus':13 'conduct':29 'exclud':3 'film':30 'generat':2 'industri':35 'ion':1 'ioniz':12 'laboratori':33 'manufactur':18 'metal':27 'modif':23 'name':11 'purif':7,10 'resin':25 'scientif':32 'semiconductor':20 'set':36 'substrat':26 'surfac':22 'use':15 'water':9

Semiconductor manufacturing machines; thin film forming machines for semiconductor wafers; vacuum thin film forming machines; polymerized thin film forming machines using plasma; metal working machines

'film':5,13,18 'form':6,14,19 'machin':3,7,15,20,25 'manufactur':2 'metal':23 'plasma':22 'polymer':16 'semiconductor':1,9 'thin':4,12,17 'use':21 'vacuum':11 'wafer':10 'work':24

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