Scanning electron microscopes; semiconductor wafer evaluation and inspection apparatus for use in semiconductor manufacturing and lithography; semiconductor and integrated circuit evaluation and inspection apparatus for use in semiconductor manufacturing, integrated circuit manufacturing, and lithography; software for evaluation and inspection of semiconductors and semiconductor wafers

'apparatus':9,24 'circuit':20,31 'electron':2 'evalu':6,21,37 'inspect':8,23,39 'integr':19,30 'lithographi':16,34 'manufactur':14,29,32 'microscop':3 'scan':1 'semiconductor':4,13,17,28,41,43 'softwar':35 'use':11,26 'wafer':5,44

DBA Hitachi High-Technologies Corporation

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