U.S. federal trademark · Serial No. 77247020
Chemicals for use in chemical vapor and atomic layer deposition processes to manufacture interconnects for integrated circuits, integrated circuit substrates, solar cells, flat panel displays, multi-chip modules, micro-electromechanical systems; chemicals for use in chemical vapor deposition process to fabricate electrode materials for batteries and fuel cells; chemicals to manufacture catalysts by chemical vapor deposition and atomic layer deposition processes
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