U.S. federal trademark · Serial No. 79273071 · Reg. No. 6187246
Apparatus and instruments for thin film processing, namely, thin film processing machines; apparatus and instruments for thin film processing namely, power operated atomic layer deposition tools, power operated chemical vapour deposition tools, power operated etch tools and power operated cluster tools; apparatus and instruments for thin film processing namely, power operated atomic layer deposition tools, power operated etch tools and power operated cluster tools with automated handling; flexible ion beam processing systems for ion beam etching and ion beam deposition, namely, machines and machine tools for ion beam etching and deposition
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