U.S. federal trademark · Serial No. 79417934 · Reg. No. 8045416
[ Dispensing installations ] * Installations for distribution * for sublimated industrial chemicals for vapor deposition of thin layers and nanoparticles in the * form * [ nature of ] * distribution systems by vaporization of solid precursors, * [ solid precursor vaporization delivery systems ] primarily * comprising * [ comprised of ] heating and cooling installations for vaporization of solid precursor; heating and cooling installations for vaporization and sublimation of industrial chemicals for vapor deposition of thin layers and nanoparticles
Sublimated industrial chemicals for vapor deposition of thin layers and nanoparticles
Analysis [ , control, signaling, measurement and visualization apparatus and instruments ] * and instruments for analysis, monitoring, signaling, measurement and visualization * for distribution of sublimated industrial chemicals for vapor deposition of thin layers and nanoparticles, namely, gas pressure indicators, gas flow * controllers * [ monitors, ] temperature sensors, temperature controllers for * monitoring * [ controlling ] the temperature of the gases and chemical products, automatic valves, programmable logic controller (PLC), flow switches for monitoring and controlling the flow of gases or liquids, and touchscreen monitors
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