Semiconductor wafer processing machines, namely, wafer handling systems, wafer dryers, wafer cleaning units, wafer process bath equipment; semiconductor wafer cleaning machines, namely, ultrasonic generating devices for cleaning wafers and ultrasonic cleaning units for use in cleaning semiconductor wafers, wafer transfer robots, and wafer wet station equipment

'bath':16 'clean':12,20,27,31,36 'devic':25 'dryer':10 'equip':17,46 'generat':24 'handl':7 'machin':4,21 'name':5,22 'process':3,15 'robot':41 'semiconductor':1,18,37 'station':45 'system':8 'transfer':40 'ultrason':23,30 'unit':13,32 'use':34 'wafer':2,6,9,11,14,19,28,38,39,43 'wet':44

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