Sputtering equipment for the manufacture of thin film disks, namely, getter pumps, turbo pumps, cryogenic pumps and roughing pumps which remove atmospheric constituents; thin film deposition machine components, namely, rotors and vacuum chambers; replacement parts for all the aforesaid goods

'aforesaid':39 'atmospher':22 'chamber':33 'compon':28 'constitu':23 'cryogen':15 'deposit':26 'disk':9 'equip':2 'film':8,25 'getter':11 'good':40 'machin':27 'manufactur':5 'name':10,29 'part':35 'pump':12,14,16,19 'remov':21 'replac':34 'rotor':30 'rough':18 'sputter':1 'thin':7,24 'turbo':13 'vacuum':32

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