adsorbed gas provided in a gas supply container holding solid adsorbent material for use in the manufacture of semi-conductors and for use in other industrial processes

'adsorb':1,11 'conductor':21 'contain':8 'gas':2,6 'hold':9 'industri':27 'manufactur':17 'materi':12 'process':28 'provid':3 'semi':20 'semi-conductor':19 'solid':10 'suppli':7 'use':14,24

metal gas supply containers holding solid adsorbent material on which adsorbed gas is stored and from which gas is desorbed for dispensing from the container

'adsorb':7,11 'contain':4,25 'desorb':20 'dispens':22 'gas':2,12,18 'hold':5 'materi':8 'metal':1 'solid':6 'store':14 'suppli':3

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