adsorbed gas for use in the manufacture of semi-conductors and microelectronic products, as provided in a gas supply container holding adsorbent material

'adsorb':1,23 'conductor':11 'contain':21 'gas':2,19 'hold':22 'manufactur':7 'materi':24 'microelectron':13 'product':14 'provid':16 'semi':10 'semi-conductor':9 'suppli':20 'use':4

automated gas flow controllers and gas flow monitors

'autom':1 'control':4 'flow':3,7 'gas':2,6 'monitor':8

Metal gas supply containers holding adsorbent material on which adsorbed gas is stored and from which gas is desorbed for dispensing from the container

'adsorb':6,10 'contain':4,24 'desorb':19 'dispens':21 'gas':2,11,17 'hold':5 'materi':7 'metal':1 'store':13 'suppli':3

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