computer software programs and accompanying instruction manuals sold as a unit for use in implementation or testing of SECS communications in host or equipment applications for the automation of semiconductor, circuit board, and other factory equipment

'accompani':5 'applic':25 'autom':28 'board':32 'circuit':31 'communic':20 'comput':1 'equip':24,36 'factori':35 'host':22 'implement':15 'instruct':6 'manual':7 'program':3 'sec':19 'semiconductor':30 'softwar':2 'sold':8 'test':17 'unit':11 'use':13

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