Optical test equipment, namely, monitoring, measuring and inspection instruments and computer operating systems thereof, computer hardware and software for product quality control in the field of semiconductor manufacturing; monitoring, measurement and inspection equipment systems comprised of monitoring, measuring and inspection instruments and computer operating systems thereof for process control of semiconductors manufacturing

'compris':35 'comput':11,15,43 'control':22,49 'equip':3,33 'field':25 'hardwar':16 'inspect':8,32,40 'instrument':9,41 'manufactur':28,52 'measur':6,30,38 'monitor':5,29,37 'name':4 'oper':12,44 'optic':1 'process':48 'product':20 'qualiti':21 'semiconductor':27,51 'softwar':18 'system':13,34,45 'test':2 'thereof':14,46

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