SEMILAB

Owners

Goods & Services

Research and development in the field of semiconductor metrology, photovoltaic metrology, and flat panel display metrology; Custom design of metrology equipment to the specification of others

Scientific instruments in the field of semiconductor manufacturing, namely, metrology instruments for contamination monitoring, defect inspection, contamination analysis, nano surface characterization, EPI resistivity measurement, EPI thickness measurement, compound material characterization, ion implant monitoring, thin film thickness measurement, electrical characterization of dielectrics and interfaces, characterization of 3D structures, metallization control, and dielectric porosity measurement; Photovoltaic instruments for controlling the crystalline silicon solar cell manufacturing process, namely, instruments for silicon ingot and block testing, silicon wafer sorting, inline process control, offline process control, laboratory applications, and thin film applications; Scientific instruments for monitoring the production of flat panel displays, namely, instruments for monitoring the manufacturing of full-tone and half tone (photoresist), printed OLED sub-pixel characterization, IGZO electrical characterization, sheet resistance measurement, thin film characterization, ELA process characterization (LTPS), and bare glass