Chemical diffusing agents for use in the manufacture of semiconductors; Chemical source material for the deposition of thin films upon semiconductor wafers for the manufacture of semiconductors; Chemicals for use in the manufacture of semiconductors; Chemicals, namely, precursors of materials used to manufacture semiconductors

'agent':3 'chemic':1,11,28,36 'deposit':16 'diffus':2 'film':19 'manufactur':8,25,33,43 'materi':13,40 'name':37 'precursor':38 'semiconductor':10,21,27,35,44 'sourc':12 'thin':18 'upon':20 'use':5,30,41 'wafer':22

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