Recorded computer software for designing and manufacturing semiconductors and micro-electro- mechanical systems (MEMS); Recorded computer software for virtual prototyping of three-dimensional models for the design of semiconductor devices; Recorded computer simulation software for modeling semiconductor manufacturing; Recorded computer software comprising a library of 3d models and design tools for computer aided design of micro-electro- mechanical systems (MEMS); Recorded computer simulation software for modeling plasma

'3d':48 'aid':55 'compris':44 'comput':2,17,34,42,54,65 'design':5,29,51,56 'devic':32 'dimension':25 'electro':12,60 'librari':46 'manufactur':7,40 'mechan':13,61 'mem':15,63 'micro':11,59 'micro-electro':10,58 'model':26,38,49,69 'plasma':70 'prototyp':21 'record':1,16,33,41,64 'semiconductor':8,31,39 'simul':35,66 'softwar':3,18,36,43,67 'system':14,62 'three':24 'three-dimension':23 'tool':52 'virtual':20

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