Semiconductor Wafer Processing Equipment; namely, epitaxial reactors; chemical vapor deposition reactors, physical vapor deposition reactors; plasma etchers; ion implanters; chemical mechanical polishers, and semiconductor wafer process diagnostic and control equipment in the nature of optical and charged particle units for the inspection, review, and measurement of semiconductor elements

'charg':37 'chemic':8,20 'control':29 'deposit':10,14 'diagnost':27 'element':48 'epitaxi':6 'equip':4,30 'etcher':17 'implant':19 'inspect':42 'ion':18 'measur':45 'mechan':21 'name':5 'natur':33 'optic':35 'particl':38 'physic':12 'plasma':16 'polish':22 'process':3,26 'reactor':7,11,15 'review':43 'semiconductor':1,24,47 'unit':39 'vapor':9,13 'wafer':2,25

SEMVU

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