Optical inspection system for silicon solar cell wafers in various stages of processing, said system comprised of imaging cameras, optical filters, control computer, and monochromatic illumination source comprised of laser and LED light sensors, the foregoing used to illuminate solar cell wafers with infra-red and visible light and thereby to acquire a spatial image of the band-edge luminescence emitted by the wafer using an imaging camera

'acquir':53 'band':60 'band-edg':59 'camera':19,70 'cell':7,41 'compris':16,28 'comput':23 'control':22 'edg':61 'emit':63 'filter':21 'forego':36 'illumin':26,39 'imag':18,56,69 'infra':45 'infra-r':44 'inspect':2 'laser':30 'led':32 'light':33,49 'luminesc':62 'monochromat':25 'optic':1,20 'process':13 'red':46 'said':14 'sensor':34 'silicon':5 'solar':6,40 'sourc':27 'spatial':55 'stage':11 'system':3,15 'therebi':51 'use':37,67 'various':10 'visibl':48 'wafer':8,42,66

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