manufacturing services for others in the field of semiconductor tools and semiconductor chamber components; manufacturing services for others in the field of electrostatic chucks, cooling bases, gas distribution plates, nozzles, and liners; manufacturing services for others in the field of hybrid electrostatic chucks with interdigitated electrode design; prototype fabrication of new products for others; technical consulting related to the manufacturing of electrostatic chucks

'base':26 'chamber':13 'chuck':24,43,63 'compon':14 'consult':56 'cool':25 'design':47 'distribut':28 'electrod':46 'electrostat':23,42,62 'fabric':49 'field':7,21,39 'gas':27 'hybrid':41 'interdigit':45 'liner':32 'manufactur':1,15,33,60 'new':51 'nozzl':30 'other':4,18,36,54 'plate':29 'product':52 'prototyp':48 'relat':57 'semiconductor':9,12 'servic':2,16,34 'technic':55 'tool':10

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