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Downloadable computer software for use in process control and yield management for the semiconductor, integrated circuit and related microelectronics manufacturing industries; downloadable computer software for testing, inspecting, characterizing, and predicting physical and electrical properties of semiconductors, integrated circuits, microelectronics, wafers, and lithographic masks; downloadable computer software for providing analytic data on the performance of inspection and metrology tools; downloadable computer software used for monitoring, controlling, and improving semiconductor and integrated circuit manufacturing processes; downloadable computer software used for event prediction in the manufacturing of semiconductors and integrated circuits; downloadable computer software for use in detecting defective semiconductor electronic components; Computer software for use in process control and yield management for the semiconductor, integrated circuit and related microelectronics manufacturing industries recorded on computer media; computer software for testing, inspecting, characterizing, and predicting physical and electrical properties of semiconductors, integrated circuits, microelectronics, wafers, and lithographic masks recorded on computer media; computer software for providing analytic data on the performance of inspection and metrology tools recorded on computer media; computer software used for monitoring, controlling, and improving semiconductor and integrated circuit manufacturing processes recorded on computer media; computer software used for event prediction in the manufacturing of semiconductors and integrated circuits recorded on computer media; computer software for use in detecting defective semiconductor electronic components recorded on computer media