repair and maintenance services of semiconductor wafer processing equipment and components

'compon':11 'equip':9 'mainten':3 'process':8 'repair':1 'semiconductor':6 'servic':4 'wafer':7

computer programs and semiconductor wafer processing equipment and components, namely epitaxial reactors, chemical vapor deposition reactors, physical vapor deposition reactors, plasma etchers, ion implanter, supporting frames therefor; and parts therefor

'chemic':13 'compon':9 'comput':1 'deposit':15,19 'epitaxi':11 'equip':7 'etcher':22 'frame':26 'implant':24 'ion':23 'name':10 'part':29 'physic':17 'plasma':21 'process':6 'program':2 'reactor':12,16,20 'semiconductor':4 'support':25 'therefor':27,30 'vapor':14,18 'wafer':5

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