U.S. federal trademark · Serial No. 79210887 · Reg. No. 5477707
Equipment and machines for the processing and production of semiconductor substrates, masks, thin films, silicon discs and wafers, namely, machines for cleaning a surface and polishing machines for use in polishing semiconductor substrates, thin films, silicon discs and wafers; Machines and machine tools for the processing and production of semiconductor substrates, masks, thin films, silicon discs and wafers, namely, photoresist coaters, photolithography tools, photoresist developing tools, post-exposure baking tools, etching tools, photoresist stripping tools, and photomask cleaning tools
Source: USPTO federal trademark records. Informational only, not legal advice. Status and details may lag the live USPTO database.