NON-INVASIVE SYSTEMS, NAMELY, COMPUTER SOFTWARE, INTRA-FAB SENSORS, AND ELECTRICAL DEVICES, NAMELY, RF-RADIOS, LOW-FREQUENCY RADIOS, BLUE-TOOTH DEVICE, SPREAD-SPECTRUM RADIOS, ALL ASSOCIATED WITH SEMICONDUCTOR FABRICATION FOR REMOTELY CONTROLLING, MONITORING AND DIAGNOSING POTENTIAL MALFUNCTIONS OF SEMICONDUCTOR FABRICATION EQUIPMENT AND COMPONENTS, SUCH AS VALVE, CRYO PUMP, AND VACUUM PUMP

'associ':32 'blue':24 'blue-tooth':23 'compon':49 'comput':6 'control':38 'cryo':53 'devic':14,26 'diagnos':41 'electr':13 'equip':47 'fab':10 'fabric':35,46 'frequenc':21 'intra':9 'intra-fab':8 'invas':3 'low':20 'low-frequ':19 'malfunct':43 'monitor':39 'name':5,15 'non':2 'non-invas':1 'potenti':42 'pump':54,57 'radio':18,22,30 'remot':37 'rf':17 'rf-radio':16 'semiconductor':34,45 'sensor':11 'softwar':7 'spectrum':29 'spread':28 'spread-spectrum':27 'system':4 'tooth':25 'vacuum':56 'valv':52

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