Electronic semi-conductors; electric resistors, capacitors, and coils; silicon wafers; silicon pillars for microfluidic applications; cantilevers for sensor applications; silicon optical mirrors, namely, customizable chips containing movable micromirror arrays made of monocrystalline silicon that can be controlled by applying electrostatic forces; silicon optical benches, namely, silicon substrates made of a combination of various oxide, polymer, and metal layers that serve as a general carrier of optical and electrical components for optical lasers, fibers, and lenses

'appli':40 'applic':16,20 'array':30 'bench':45 'cantilev':17 'capacitor':7 'carrier':65 'chip':26 'coil':9 'combin':52 'compon':70 'conductor':4 'contain':27 'control':38 'customiz':25 'electr':5,69 'electron':1 'electrostat':41 'fiber':74 'forc':42 'general':64 'laser':73 'layer':59 'lens':76 'made':31,49 'metal':58 'microfluid':15 'micromirror':29 'mirror':23 'monocrystallin':33 'movabl':28 'name':24,46 'optic':22,44,67,72 'oxid':55 'pillar':13 'polym':56 'resistor':6 'semi':3 'semi-conductor':2 'sensor':19 'serv':61 'silicon':10,12,21,34,43,47 'substrat':48 'various':54 'wafer':11

SILEX MICROSYSTEMS

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