Components of equipment for the manufacture, processing, and fabrication of semiconductors; Components of equipment for the manufacture, processing, and fabrication of semiconductors, namely, c-shroud rings, slotted rings, edge rings, mechanisms for sealing; Replacement parts for equipment for the manufacture, processing, and fabrication of semiconductors; Replacement parts for equipment for the manufacture, processing, and fabrication of semiconductors, namely, c-shroud rings, slotted rings, edge rings, and mechanisms for sealing

'c':25,61 'c-shroud':24,60 'compon':1,12 'edg':30,66 'equip':3,14,38,50 'fabric':9,20,44,56 'manufactur':6,17,41,53 'mechan':32,69 'name':23,59 'part':36,48 'process':7,18,42,54 'replac':35,47 'ring':27,29,31,63,65,67 'seal':34,71 'semiconductor':11,22,46,58 'shroud':26,62 'slot':28,64

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