Contactors and contactor probe cards, made of Micro-Electro-Mechanical Systems (MEMS) material including mechanical elements, sensors, actuators, and electronics on a common silicon substrate, for use in testing equipment to test electronic circuits and electronic devices, namely, semiconductor wafers, integrated circuits, printed circuit boards, semiconductor chips, and packaged semiconductor devices

'actuat':19 'board':46 'card':5 'chip':48 'circuit':35,43,45 'common':24 'contactor':1,3 'devic':38,52 'electro':10 'electron':21,34,37 'element':17 'equip':31 'includ':15 'integr':42 'made':6 'materi':14 'mechan':11,16 'mem':13 'micro':9 'micro-electro-mechan':8 'name':39 'packag':50 'print':44 'probe':4 'semiconductor':40,47,51 'sensor':18 'silicon':25 'substrat':26 'system':12 'test':30,33 'use':28 'wafer':41

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