substrate, namely, a conductive, semi-conductive, or non-conductive material, used for the manufacture of articles such as semiconductor wafers, disks, integrated circuit devices, flat panel displays, piezoelectronic devices, photonic devices, microelectromechanical systems, sensors, actuators, solar cells, biological and biomedical devices, and the like

'actuat':37 'articl':18 'biolog':40 'biomed':42 'cell':39 'circuit':25 'conduct':4,7,11 'devic':26,31,33,43 'disk':23 'display':29 'flat':27 'integr':24 'like':46 'manufactur':16 'materi':12 'microelectromechan':34 'name':2 'non':10 'non-conduct':9 'panel':28 'photon':32 'piezoelectron':30 'semi':6 'semi-conduct':5 'semiconductor':21 'sensor':36 'solar':38 'substrat':1 'system':35 'use':13 'wafer':22

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